Displacement of a Piezoelectric Bending Actuator in Free Air
g
8
<0
Q.
<0
Q
1(⅛l
2nd Resonant
Frequency = 300Hz
Primary Resonant ......
Frequency = 30Hz.
6.2mm @ 80V)
4
10 =
2
10 =
1θl
80 √?
333μm @80V.)
. , , 7________ι - /20 £
50 100 150 200 250 300350^400
Frequency (Hz)
0 50 100 150 200 250 300 350 400
Frequency (Hz)
Figure 3 Performance graphs of the piezoelectric bending actuators. (A) Displacement of the piezo
as a function Offrequency and voltage. (B) The acoustic emissions of the piezo as a function of
displacement at different frequencies. Frequendes below IOOHz did not produce any acoustic
emissions significantly greater than the background noise. (C) Displacement as a function of
frequency at two voltages. This graph highlights the resonant peaks at 30 and 300Hz.
6000
5000
4000
2000
1000
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