17
Figure 2.2 - Bank of mass flow controllers and water bubbler.
|
Ti (°C) |
Ts (°C) |
tb (min) |
ts (min) |
Qb (seem) |
Qc (slm) |
Q∣1 (seem) |
|
300 |
775 |
1 |
30 |
85 |
1.3 |
115 |
Table 2.1 - Parameters for optimal water-assisted CVD growth.
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